3-D Sampling routine using
VPW software for multiple
ion-probe measurements:

The bottom probe makes measurements at four locations:
(1) at 0,0,0 the local origin at the nominal XYZ location
(2) at -10,0,0 the differential position in the X direction
(3) at 0,-10,0 the differential position in the Y direcction
(4) at 0,0,-10 the differential position in the Z direction.

Subsequently, the top probe is brought
into position and it makes its measurements
with a similar or unique sampling pattern.
Currently, the number of types of ion-probes which
can be used in a defined sequence is only limited
by space to mount the probes on a common motion
controller, time and available probe amplifiers.