3-D Sampling routine using VPW software for multiple ion-probe measurements: The bottom probe makes measurements at four locations: (1) at 0,0,0 the local origin at the nominal XYZ location (2) at -10,0,0 the differential position in the X direction (3) at 0,-10,0 the differential position in the Y direcction (4) at 0,0,-10 the differential position in the Z direction. Subsequently, the top probe is brought into position and it makes its measurements with a similar or unique sampling pattern. Currently, the number of types of ion-probes which can be used in a defined sequence is only limited by space to mount the probes on a common motion controller, time and available probe amplifiers. |